Measurement of Channel Depth by Using a General Microscope Based on Depth of Focus
Jiangjiang Liu 1,   Chao Tian 2,   Zhihua Wang 3,   Jin-Ming Lin 1, 2  
 
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1
Department of Chemistry, Tsinghua University, Beijing 100084, China
2
State Key Laboratory of Environmental Chemistry and Ecotoxicology, Research Centre for Eco-Environmental Sciences, Chinese Academy of Sciences, Beijing 100085, China
3
State Key Laboratory of Chemical Resource Engineering, Beijing University of Chemical Technology, Beijing 100029, China
CORRESPONDING AUTHOR
Jin-Ming Lin   

State Key Laboratory of Environmental Chemistry and Ecotoxicology, Research Center for Eco-Environmental Sciences, Chinese Academy of Sciences, Beijing 100085, China; Department of Chemistry, Tsinghua University, Beijing 100084, China.
Online publication date: 2007-03-01
Publication date: 2007-03-01
 
Eurasian J Anal Chem 2007;2(1):12–20
 
ABSTRACT
This paper presents a simple and rapid method to measure the depth of the channel of microfluidic chip. With the depth of focus (DOF) low to few micro-meters, general microscopes show the strong axial (or longitudinal) resolving power. With the assistant of fine-adjustment, the objective was controlled accurately to focus on the channel side and channel bed respectively. Then the depth was calculated from the scales that fine adjustments turned. Experiments results demonstrated the possibilities of depth measurement with normal microscope. Compared with other methods, this method showed high degree of precision with a deviation less than 0.6μm while the magnification was 100X. This method is rapid, simple and reliable, and it is very suitable for monitoring the etching process to optimize the function of microfluidic chip.
 
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