Micromachined Ionization Vacuum Gauge and Improve its Sensitivity with Magnetic Field
 
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University of Urmia, IRAN
CORRESPONDING AUTHOR
Sadegh Mohammadzadeh Bazarchi   

Faculty of Electrical Engineering, University of Urmia, Urmia, Iran
Online publish date: 2017-10-01
Publish date: 2017-10-01
 
Eurasian J Anal Chem 2017;12(Interdisciplinary Perspective on Sciences 7b):1137–1151
KEYWORDS
ABSTRACT
One of the most efficient methods for Ultra High Vacuum (UHV) measurement is the use of hot-filament ionization gauge which has been employed for several decades and can quantify pressures up to 〖10〗^(-12) torr. Large volume and high-power consumption are main drawbacks of this gauge. In this paper, a MEMS type ionization vacuum gauge has been introduced which occupies a volume of 3mm×1.5mm×1.5mm and is manufacturable with micromachines technology. Also, it operates based on gas ionization. In addition of low volume, the proposed structure has the advantages of low power consumption, low price and fast response time. With the help of COMSOL and MATLAB, a method has been proposed which helps us to obtain average length of movement for electron 1, average energy of the electrons, electron speed, elastic and ionization collision frequency and sensitivity coefficient S. Simulation results have been compared with theoretical analytic results in which there is good conformity between these results. Also, by means of the presented method in this article, the physical characteristics of the gauge can be optimized to achieve better performance. For the proposed scheme by introducing the magnetic field as the novel idea, the sensitivity coefficient has been enhanced up to 60% in comparison with similar structures.
 
REFERENCES (13)
1.
Hanlon, F. O. (2004). User’s Guide to Vacuum Technology. New York: John Wiley and sons.
 
2.
BAG model ETI8136: global sources. (2017). Global sources. Retrieved from http://www.globalsources.com/s.... [Accessed 28 august 2017].
 
3.
Bayard-Alpert Ionization Gauges. (2017). Stanford research system. Retrieved from http://www.thinksrs.com/produc.... [Accessed 28 august 2017].
 
4.
Series 943 operation and maintenance manual cold cathode Vacuum Sensor System. (2017). MKS Instrument Inc. Retrieved from https://www.mksinst.com/docs/R.... [Accessed 28 august 2017].
 
5.
Filipelli, A. (1999). A miniature Dual-Collector Ionization Gauge. In Proceedings of the 46th International Symposium, American Vacuum Society, Washington State Convention Center.
 
6.
Mini Ion Gauge (MIG). (2017). Hot Cathode Ionization Pressure Vacuum Sensor, MKS, Inc. Retrieved from https://www.mksinst.com/produc.... [Accessed 28 august 2017].
 
7.
Lafferty, J. M. (1997). Foundations of Vacuum Science and Technology. New York: John Wiley and Sons.
 
8.
Shigemi Suginuma, T. K. (2016). Simulation of Relative Sensitivity Coefficient of Bayard-Alpert Gauge. Journal of the Vacuum Society of Japan, 59(6), 156-159.
 
9.
Yong-Ki Kim, J.-P. D. (2002). Ionization of carbon, nitrogen, and oxygen by electron impact. Journal of Physical Review, 66(1), 275-284.
 
10.
Kaido Tämm, P. B. (2013). Theoretical modeling of sensitivity factors of Bayard-Alpert ionization gauges. Journal of International Journal of Mass Spectrometry, 37(2), 52-58.
 
11.
Humphries, S. (2013). Charged particle beams. New York: Dover.
 
12.
Enketeswara, R., Vidyadhara, S., Sasidhar, L. C, Ganesh Kumar, T. N. V., & Rokiya, Md. (2016). A Novel Stability Indicating RP-HPLC Method Development and Validation for The Simultaneous Estimation of Losartan Potassium, Ramipril and Hydrochlorothiazide in Bulk and Pharmaceutical Dosage Form. Eurasian Journal of Analytical Chemistry, 5(3), 255-265.
 
13.
Veena, D. S., & Sanjay, J. D. (2017). Optimization of RP-HPLC Method for Simultaneous Estimation of Lamivudine and Raltegravir in Binary Mixture by Using Design of Experiment. Eurasian Journal of Analytical Chemistry, 8(2), 179-195.
 
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